Fully Automatic Expansion Resistance Measurement Device SRP2000
Fully automatic spreading resistance measurement device
The SRP (Spreading Resistance Profiler) device measures the resistivity profile of silicon in the depth direction, the thickness of the EPI layer, the depth of the PN junction, and the carrier concentration distribution by making contact with two probes on a diagonally polished silicon wafer in the depth direction and measuring the spreading resistance value between the probes.
- 企業：日本セミラボ 新横浜本社
- 価格：Other
